High-Precision CNC Machined Baseplate with Micron-Level Flatness and Semiconductor-Grade Cleanliness

As a specialized provider of high-precision CNC machining services, we focus on resolving critical industry challenges associated with the processing of large-diameter, thin-walled components—specifically, their susceptibility to deformation and the inherent difficulty in maintaining tight dimensional tolerances.

This series of precision baseplates is engineered specifically for the semiconductor, optical equipment, and high-end automation sectors. While achieving ultra-high levels of flatness, these components simultaneously ensure the high-precision positioning of complex hole patterns and robust structural stability.

Leveraging 15 years of industrial manufacturing expertise, we efficiently process a diverse range of materials—including aerospace-grade aluminum, stainless steel, and various specialized alloys—to deliver customized baseplate solutions that meet the rigorous standards of high-end global manufacturing.

To address the deformation issues commonly encountered with large-diameter disc-shaped components, we employ an optimized stress-relief machining process combined with vacuum-chucking technology. This approach effectively minimizes machining-induced stress and mitigates the risk of deformation.

The result is a finished product that retains micron-level flatness and parallelism post-processing, thereby satisfying the exacting requirements of high-precision assembly and demanding operational environments.

Utilizing advanced 4-axis and 5-axis CNC machining centers, we are able to complete the machining of all precision hole locations and slot structures in a single setup.

This process eliminates cumulative errors associated with multiple setups at the source, ensuring that critical positional tolerances are consistently maintained within ±0.01 mm—a factor that significantly enhances assembly precision and consistency.

For applications within the semiconductor industry and other high-cleanliness environments, we offer a range of high-standard surface treatment processes, including:

• Hard Anodizing
• Electropolishing
• Teflon (PTFE) Coating

Through rigorous process controls, we ensure that our components exhibit extremely low outgassing rates and superior corrosion resistance, thereby meeting the stringent operational requirements of cleanroom environments.

Every precision baseplate undergoes a 100% inspection using Zeiss Coordinate Measuring Machines (CMM) to ensure that all dimensional tolerances fully comply with design specifications.

Furthermore, by utilizing unique workstation identifiers and batch codes applied to the component surfaces, we establish a precise link between production data and inspection records. This system ensures that the entire manufacturing process remains fully traceable, verifiable, and controllable.